SUBSTRATE FIXING TOOL AND SUBSTRATE MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To remove chips discharged from a rotary cutting tool by sucking them from the an upper side of a substrate. SOLUTION: A substrate fixing tool 10 has a substrate storage part 14 for storing the substrate 12 with the part mounting surface of the substrate 12 facing upward and a lid 16 for covering the substrate 12 stored in a substrate storage part 14. A through groove 16a passing through the lid so as to be extended and allowing a rotary cutting tool 50 for cutting the substrate 12 to be inserted into is arranged at the lid 1. A lid suction passage 16b is extended in the lid 16 and is opened to the inner surface of the through groove 16a. COPYRIGHT: (C)2011,JPO&INPIT