| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compound capable of forming patterns having excellent pattern resolution and line edge roughness, and to provide a resist composition using the same. <P>SOLUTION: There is provided a compound represented by formula (I-Pb), [wherein, X<SP>Pb</SP>is a single bond or -O-; R<SP>Pb</SP>is a single bond, a divalent aliphatic hydrocarbon group, an alicyclic hydrocarbon group or an aromatic hydrocarbon group; methylene groups contained in the aliphatic hydrocarbon group and the alicyclic hydrocarbon group each may be replaced by oxygen atom or a carbonyl group; Y<SP>Pb</SP>is a polymerizable group; Z<SP>Pb</SP>is an organic group; X<SP>Pc</SP>is a single bond or an alkylene group; R<SP>Pc</SP>is an aliphatic hydrocarbon group, an alicyclic hydrocarbon group or an aromatic hydrocarbon group which may have one or more substituents; methylene groups contained in the aliphatic hydrocarbon group and the alicyclic hydrocarbon group each may be replaced by an oxygen atom or a carbonyl group]. <P>COPYRIGHT: (C)2011,JPO&INPIT |
