发明名称 METAL COATED POLYIMIDE FILM AND METHOD FOR MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a metal coated polyimide film capable of corresponding to the fine-pitching of an electronic circuit, extremely reduced in the number of pinholes, having high folding resistance and superior in dimensional stability, and a method for manufacturing the same. <P>SOLUTION: When a substrate metal layer composed of a nickel-chromium alloy layer and a copper layer is provided on the surface of a polyimide film by a dry plating method according to a reel-to-reel system and a copper plating layer is provided on the substrate metal layer, the part coming into contact with a feed device is set to only the surface of the polyimide film in the feed during the period until the polyimide film having the substrate metal layer formed thereon is taken up by a roll after the nickel-chromium alloy layer is provided on the surface of the polyimide film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011037214(A) 申请公布日期 2011.02.24
申请号 JP20090188847 申请日期 2009.08.18
申请人 SUMITOMO METAL MINING CO LTD 发明人 SONE HIROBUMI;OGASAWARA SHUICHI
分类号 B32B37/00;B32B15/08;B32B15/088;H01L21/60 主分类号 B32B37/00
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