| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating nozzle formed with a slot part for discharging liquid onto end faces of a substrate and the face of the substrate adjacent to the end faces. <P>SOLUTION: The coating nozzle 10 has a nozzle body 11 having an inlet opening receiving liquid fed from a liquid feed valve and an outlet opening discharging the liquid, a distribution plate 12 disposed adjacent to the nozzle body and having groove holes distributing the liquid discharged from the outlet opening, a shim plate 13 disposed adjacent to the distribution plate and having a cutout part communicating with the groove holes of the distribution plate, and a shield plate 14 disposed adjacent to the shim plate and covering the cutout part of the shim plate. The slot part discharging the liquid onto the end faces of the substrate and the face of the substrate adjacent to the end faces, is formed by the cutout part of the shim plate between the distribution plate and shield plate. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
