| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method capable of attaining high accuracy by limiting the distortions of an optical image to a minimum. SOLUTION: In the inspection device 100, the light irradiated from a light source 1 to a mask 22 forms an image on a line sensor 5, being reflected by a mirror 25 via a lens 4, after being transmitted via the mask 22. The position of a stage 2 is measured by a laser length measuring system 7a, and the position of an enlarging optical system 200 is measured by a laser length measuring system 7b. The angle of the mirror 25 is controlled by a mirror control part 26, based on the difference in the acquired position of the stage 2 and the position of the enlarging optical system 200. Furthermore, the moving speed of the stage 2 is controlled by a stage control part 15 based on these differences. COPYRIGHT: (C)2011,JPO&INPIT
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