| 摘要 |
PROBLEM TO BE SOLVED: To prevent an arm of a substrate carrier device from touching a deformed wafer when the arm is inserted into a cassette, with reference to the substrate carrier device that transfers a substrate such as a semiconductor wafer contained in the cassette to a predetermined location. SOLUTION: The substrate carrier device is characterized by comprising: a detection unit that detects a vertical position of the leading edge of the substrate horizontally stored, leaving a space between the adjoining substrates, in a vertical direction in a storage container; a lifting unit that is inserted into under the leading edge of the substrate to be transferred and lifts the leading edge of the substrate to a predetermined position; the arm that is inserted into under the substrate to be transferred, while the leading edge is lifted to a predetermined position by the lifting unit, and picks up the substrate after holding it; and a control unit that controls the operation of the lifting unit and the arm based on the detection information of the detection unit. COPYRIGHT: (C)2011,JPO&INPIT
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