| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing a single crystal by which a single crystal controlled in quality more highly precisely can be produced by correctly controlling the rotation speed of the single crystal. SOLUTION: The apparatus 10 for producing a single crystal includes: a seed crystal holder 18 holding a seed crystal 17 for growing a single crystal 16 by bringing the seed crystal into contact with a melt 13 of the raw material substance in a crucible 12; a wire rope 19 to which the seed crystal holder 18 is attached; and a winding mechanism 20 that winds up the wire rope 19 while rotating and pulls the seed crystal and the single crystal grown on the seed crystal while rotating. The apparatus further includes: a single crystal rotation speed measuring means 22 that measures the actual rotation speed of the single crystal 16 to be pulled; and a control means 23 that controls the winding mechanism 20 in such a manner that the rotation speed of the single crystal reaches a target rotation speed by using the actual rotation speed of the single crystal measured by the single crystal rotation speed measuring means 22. COPYRIGHT: (C)2011,JPO&INPIT
|
