| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flowmeter capable of improving a measuring precision of a flow rate of a fluid. <P>SOLUTION: The thermal flowmeter 70 comprises a sensor flow passage S for constructing a heat wire for measuring the flow rate of the fluid to be measured and a bypass flow passage B for the sensor flow passage S has a measuring chip 60 provided with the heat wire and a sensor substrate 78 for mounting the measuring chip 60 and provided with an electric circuit electrically connected to the measuring chip 60. The thermal flowmeter mounts the measuring chip 60 on the sensor substrate 78 by joining resistor electrodes 64, 65, 66, 67, 68, 69 of the measuring chip 60 and circuit electrodes 54, 55, 56, 57, 58, 59 of the sensor substrate 78 with a joint material, and is provided with through-holes in the circuit electrodes 54, 55, 56, 57, 58, 59 of the sensor substrate 78. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
