| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a defect inspection device and an image display method capable of performing optimum color display corresponding to the purpose of the defect device, defect characteristics, or the like. <P>SOLUTION: The defect inspection device includes a signal processing device for imaging an image of a photomask in various illumination conditions, detecting a defect of the photomask by using an output signal from an A/D converter, and outputting a color image of the photomask including the detected defect. The signal processing device includes a conversion table generation means 23 with respect to luminance/color, and a luminance/color conversion means 24 of the photomask. The conversion table generation means 23 generates a conversion table, based on first and second two gradation values assigned, respectively to two kinds of mask patterns, and the number of colors of RGB assigned into a luminance gradation between the first gradation value and the second gradation value, or a parameter allocated to a gradation span. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
