发明名称 PATTERNING OF THIN FILM LAYERS
摘要 Simplified patterning of layers of a thin film is disclosed. In some embodiments, the patterning can include patterning a first conductive layer using a patterned dielectric layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. In other embodiments, the patterning can include patterning a first conductive layer using a removable photosensitive layer as a mask, patterning a black mask layer using a removable photo mask, and patterning a second conductive layer using a patterned passivation layer as another mask. In still other embodiments, the patterning can include patterning a first conductive layer using a patterned black mask layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. An exemplary device utilizing the thin film so patterned can include a touch sensor panel.
申请公布号 US2011043383(A1) 申请公布日期 2011.02.24
申请号 US20090626536 申请日期 2009.11.25
申请人 KANG SUNGGU;HUANG LILI;HOTELLING STEVEN PORTER;ZHONG JOHN Z 发明人 KANG SUNGGU;HUANG LILI;HOTELLING STEVEN PORTER;ZHONG JOHN Z.
分类号 B05D5/12;H03M1/22 主分类号 B05D5/12
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