发明名称 SEMICONDUCTOR PHOTODIODE DEVICE, AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor photodiode element capable of reducing a capacity of a photoreception portion, and capable of shortening a running time of a carrier, while keeping a sufficient photoreception sensitivity, and to provide a method of manufacturing the same. <P>SOLUTION: This semiconductor photodiode device includes a semiconductor substrate, the first conductive type first semiconductor layer formed on the semiconductor substrate, the second semiconductor layer of high resistance formed on the first semiconductor layer, the first conductive type third semiconductor layer formed on the second semiconductor layer, and the second conductive type fourth semiconductor layer embedded in the second semiconductor layer, and the fourth semiconductor layer is separated by a fixed distance along a horizontal direction on a surface of the semiconductor substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011040445(A) 申请公布日期 2011.02.24
申请号 JP20090184003 申请日期 2009.08.07
申请人 HITACHI LTD 发明人 MIURA MAKOTO;SAITO SHINICHI;RI EIKON;ODA KATSUYA
分类号 H01L31/10 主分类号 H01L31/10
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