| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve the longer operating life of bearings by improving the radiation performance of a rolling bearing, in a molecular pump performing evacuation by pivotally supporting the rotating shaft of a rotor rotating at high speed by the upper and lower rolling bearings. <P>SOLUTION: The molecular pump 1 has a structure for pivotally supporting the rotating shaft 3 of the rotor 2 by the upper first ball bearing 8a and the lower second ball bearing 8b. The molecular pump 1 includes a sleeve 9 retaining the outer ring of the second ball bearing 8b, and a sleeve case 6b allowing the sleeve 9 to fit axially slidably through an O-ring 7c fitted around the periphery of the sleeve 9. The sleeve 9 and the sleeve case 6b are connected to each other through the heatsink 11 of a flexible heat transmission means. <P>COPYRIGHT: (C)2011,JPO&INPIT |
