| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar motor in which an air bearing surface of a slider can be directly maintained without detaching the slider from a platen and hanging it. <P>SOLUTION: The planar motor in which the slider 12 is levitated on the platen 11 by the air bearing 19 and is moved in a two-dimensional direction includes a detachably attaching platen 51 including an opening 51a which is externally attached with an upper surface height aligned to the platen 11 and is smaller than the bottom surface of the slider 12, a lid portion 511 for hermetically sealing the opening 51a, a driving mechanism 512 for opening and closing the lid portion 511, and a maintenance portion 18 for cleaning the air bearing surface 12a of the slider 12 through the opening portion 51a with the lid portion 511 opened. <P>COPYRIGHT: (C)2011,JPO&INPIT |
