GLASS SUBSTRATE SUCKING AND HOLDING DEVICE AND GLASS SUBSTRATE CONVEYING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a glass substrate sucking and holding device capable of preventing the neck part of a suction pad from being damaged or a glass substrate to be sucked and held from being deformed even if the glass substrate is conveyed at a high speed, and also provide a glass substrate conveying device using the glass substrate sucking and holding device. SOLUTION: This glass substrate sucking and holding device covers the surface 1a of a base which is located around the edge surface 3 of the suction pad 10 by an elastic sheet 5. The height of the surface 5a of the elastic sheet which is measured from the surface 1a of the base is lower than the edge surface 3 and higher than the inner surface 2a of the base part of the suction pad. COPYRIGHT: (C)2011,JPO&INPIT