发明名称 METHOD OF MANUFACTURING MAGNETIC HEAD FOR PERPENDICULAR MAGNETIC RECORDING
摘要 PROBLEM TO BE SOLVED: To form a magnetic pole layer for preventing problems caused by skew, precisely defining track width, and improving recording characteristics. SOLUTION: The magnetic pole layer includes a track width defining section and a wide section. A storage layer includes a groove section which is disposed on a bottom formation layer 42, and stores the magnetic pole layer. The groove section includes a first portion for storing at least a portion of the track width defining section, and a second portion for storing at least a portion of the wide section. A method of manufacturing magnetic heads includes: a process for etching a non-magnetic layer 43P, such that an initial groove including the first portion is formed in the non-magnetic layer 43P; a process for forming an initial groove mask 54 covering the first portion; and a second etching process for etching the non-magnetic layer 43P, such that the groove section is completed. In the early stage of the second etching process, the initial groove mask 54 covers a portion of the upper surface of the bottom formation layer 42 in a region where the second portion is scheduled to be formed. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011040160(A) 申请公布日期 2011.02.24
申请号 JP20100228340 申请日期 2010.10.08
申请人 HEADWAY TECHNOLOGIES INC 发明人 ARAKI HIRONORI;SASAKI YOSHITAKA;ITO HIROYUKI;TANEMURA SHIGEKI;ISHIZAKI KAZUO
分类号 G11B5/31 主分类号 G11B5/31
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