METHOD FOR FABRICATING A PHYSICAL VAPOR DEPOSITION TARGET

摘要

The present invention relates to a method for fabricating a CIS-based target for use in depositing an absorption layer of a solar cell. The method comprises: (a) a step of preparing a Cu, In and Se powder with a mole ratio of 1:1:2; (b) a step of stirring the Cu, In and Se powder and metal balls in a vessel to produce a synthesized CIS material by mechanical force; (c) a step of adding Se to the synthesized CIS material, and mixing and compressing the synthesized CIS material using a ball mill to produce a pellet having a shape corresponding to a target; and (d) a step of performing a heat treatment on the thus-produced pellet to produce a final CIS target.