ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an illumination optical system forming a pupil intensity distribution in a highly continuous circumferentially polarized state.

SOLUTION: The illumination optical system (2-10) illuminating a face (M) to be illuminated with light from a light source (1) includes: a distribution-forming optical system (2-4) which forms a pupil intensity distribution in the illumination pupil of the distribution forming optical system based on light from the light source, and causes a plurality of light fluxes having polarized states different from one another to enter each of a plurality of pupil regions of the pupil intensity distribution; and a first optical element (5) disposed at or near the illumination pupil and having a plurality of divided regions corresponding to the plurality of pupil regions. Two adjoining divided regions out of the plurality of divided regions have polarization conversion characteristics different from each other.

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