| 摘要 |
PROBLEM TO BE SOLVED: To provide a stocker which can effectively keep inside environment clean. SOLUTION: A stocker 102 comprises a body part 20 having a plurality of storage racks 22, a transfer part for transferring a storage object, a robot arm 40 for mounting the storage object transferred by the transfer part on the storage rack of the body part, and a dust collecting unit for removing particles in an inside of the body part while moving with the robot arm. COPYRIGHT: (C)2011,JPO&INPIT |
