| 摘要 |
PROBLEM TO BE SOLVED: To speedily detect a position of a different-shape part formed at an outer peripheral end of a wafer. SOLUTION: A detecting method includes acquiring a position of the outer peripheral end within an imaging range of an imaging camera 93 as imaging data by imaging the imaging range during a stop of a rotary stage 911, mounted with the wafer whose outer peripheral edge formed of an arc part and the different-shape part, while rotating the rotary stage 911 intermittently at each predetermined angle, and also acquiring position change of the outer peripheral end passing through the imaging range of the imaging camera 93 during rotation of the rotary stage 911 as measurement data. Then positions on the arc part of the wafer are selected from the imaging data, and reference data is generated which represents position change within the imaging range when positioned on the entire circumference of the circle including the arc part are positioned within the imaging range for each angle of rotation of the rotary stage 911. Then the measurement data is compared with the reference data to detect the position of the different-shape part. COPYRIGHT: (C)2011,JPO&INPIT |
