| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron gun which does not cause displacement in horizontal direction of a cathode electrode. SOLUTION: The electron gun 10 has a case 11. A cathode member 31, a heating device 32, and an anode electrode 3 are arranged in the case 11. The cathode member 31 is constructed of a cathode electrode 1 and a support column 55 which supports the cathode electrode 1. The support column 55 is located at the center of a heating filament 2<SB>1</SB>. When vacuum treatment is performed using the electron gun 10, and the filament support column 55 is heated to increase its temperature and thermally expanded, the support column 55 makes the cathode electrode 1 move in perpendicular direction but not move in horizontal direction. Thus, electrons do not shift in horizontal direction before reaching an irradiation object in the vacuum tank from the anode electrode 3, and are precisely irradiated on the irradiation object. COPYRIGHT: (C)2011,JPO&INPIT
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