发明名称 |
CARRIER FILM FOR MOUNTING POLISHING WORKPIECE AND METHOD FOR MAKING THE SAME |
摘要 |
The present invention relates to a carrier film for mounting a polishing workpiece. The carrier film comprises a surface substrate and a buffer substrate. The surface substrate consists of first elastomer, the first elastomer comprising a plurality of first holes; wherein the first holes have a drop shape, and each of the first holes has an opening. The buffer substrate consists of second elastomer, the second elastomer comprising a plurality of second holes. The surface substrate and the buffer substrate are adhered with adhesive comprising the first or the second elastomer. A method for making the carrier film is also provided. When polishing, the carrier film provides a good buffer property to conduct and release down force applied on the polishing workpiece.
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申请公布号 |
US2011045751(A1) |
申请公布日期 |
2011.02.24 |
申请号 |
US20100907382 |
申请日期 |
2010.10.19 |
申请人 |
SAN FANG CHEMICAL INDUSTRY CO., LTD. |
发明人 |
FENG CHUNG-CHIH;YAO I-PENG;WANG LYANG-GUNG;HUNG YUNG-CHANG |
分类号 |
B24B41/06;B29C65/00;B32B37/12 |
主分类号 |
B24B41/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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