HALF TONE MASK AND MANUFACTURING METHOD OF THE SAME

摘要

The present invention relates to a half tone mask and a manufacturing method of the same configured to reduce the number of processes of manufacturing the half tone mask having multiple half permeation units, thereby reducing the time and manufacturing costs, wherein the half tone mask comprises: a substrate; a transmissive area formed on the substrate for transmitting irradiated light of a predetermined wavelength range; and a half permeation area having multiple half permeation units having 2 or more mutually different transmittances to a predetermined wavelength range of light irradiated on the substrate using 2 or more half permeation materials.