METHOD FOR IMPROVING ADHESION OF ULTRAVIOLET-CROSSLINKABLE MATERIAL TO SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for improving adhesion of a layer made of a material that is crosslinkable by exposure to ultraviolet rays to a substrate, and a method for producing a transistor utilizing the same. SOLUTION: When improving adhesion of a layer made of a material M that is crosslinkable by exposure to ultraviolet rays to the surface of a substrate S, (a) a deposition step of an unpolymerized polymerizable composition P including at least one molecule F including a first reactive group F1 that is reactive with a reactive group M1 of the surface of the material M and a second reactive group F2 that is capable of forming bonds with the material(s) constituting the surface of the substrate S, (b) a deposition step of a layer made of the uncrosslinked material M on the layer of the unpolymerized composition P obtained in the step (a), and (c) a step of exposing the three-layer structure obtained in the step (b) to ultraviolet rays are included. COPYRIGHT: (C)2011,JPO&INPIT