| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device and a transfer method for surely transferring protrusion and recession to a resin layer while preventing poor transfer to the resin layer by a stamper and mixing of air bubbles into the resin, and to provide an apparatus and a method for manufacturing an optical disk. SOLUTION: The mixing of air bubbles is certainly prevented by sticking the resin layer R and the stamper ST to each other or sticking a disk substrate D1 to the resin layer R in atmosphere of reduced pressure inside of an evacuated case 10. Furthermore, curing inhibition due to oxygen in atmosphere is prevented by irradiating the resin layer R with an energy ray from an energy ray radiation means 7 and curing in the atmosphere of reduced pressure, and the protrusion and recession formed on the resin layer R are certainly fixed. Further, the resin layer R is made to follow the fine protrusion and recession of the stamper ST and to conform thereto by pressing and sticking the stamper ST to the resin layer R while making a stamper holding member 31 vibrate with a vibrator 32 to certainly transfer the protrusion and recession to the resin layer R. COPYRIGHT: (C)2011,JPO&INPIT |
