| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring a friction force, capable of performing simple and high accuracy quantitative measurement, by the use of a cantilever having a probe at its tip. SOLUTION: The method uses the principle of a friction force microscope to measure a friction force between the probe 6b and a sample 5. The method includes: a step of acquiring a light-intensity change signal due to a deflection deformation per unit length; a step of acquiring a light-intensity change signal due to twist deformation; a step of acquiring the ratio between an amplification multiplication of the light-intensity change signal due to the deflection deformation and an amplification magnification of the light-intensity change signal due to the twist deformation; a step of acquiring the ratio between the length in the longitudinal direction of the cantilever 6 of a light spot radiated from a light source 10 to the cantilever 6 and the length in a direction vertical to the long axis of the spot; and a step of acquiring the dimensions and physical constants of the cantilever. By the method, the friction force is calculated from the values acquired in each process. COPYRIGHT: (C)2011,JPO&INPIT
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