发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which can suppress degradation of junction strength between a connection pad and connection electrode caused by a test probe on the connection pad. SOLUTION: The connection pad part includes a first metal wiring layer 12 formed on an insulating layer 11 and a second metal wiring layer 14 formed on the above metal wiring layer, and is used for contact of the test probe and connection to the connection electrode. The second metal wiring layer is patterned to form a groove for exposing a portion of an upper surface of the first metal wiring layer. A width of the groove is set to prevent the test probe from coming into contact with the first metal wiring layer when the test probe is pressed on an upper surface of the second metal wiring layer. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011040669(A) 申请公布日期 2011.02.24
申请号 JP20090189031 申请日期 2009.08.18
申请人 ELPIDA MEMORY INC 发明人 TOBORI HIDENORI
分类号 H01L21/3205;H01L21/60;H01L23/52 主分类号 H01L21/3205
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