| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas port structure capable of preventing air from leaking and infiltrating into a processing vessel from a sealing part of a gas pipe. SOLUTION: The gas port structure, which introduces a gas into the processing vessel capable of vacuum exhausting to process an object, includes a gas introducing port which is provided to the end part of the processing vessel together with a nozzle inserting hole for inserting a gas nozzle, a gas introduction tube where the end part of the gas nozzle inserted into the nozzle inserting hole is inserted and connected, a seal member interposed between the end part of the gas introduction tube and the gas introducing port, a covering body so provided on the outer peripheral side of the seal member with space therebetween and cover the space, a pressing member which urges the gas introduction tube toward the gas introducing to press the seal member so that the connection part between the gas nozzle and the gas introduction tube is sealed, and an inert gas supply means for supplying the inert gas to the space. COPYRIGHT: (C)2011,JPO&INPIT
|
