发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
摘要 A semiconductor device includes a plurality of first electrodes standing over a substrate, and a supporter that supports the plurality of first electrodes in standing. The supporter includes a stack of first and second supporting films. The first supporting film has a compressive stress. The second supporting film has a tensile stress.
申请公布号 US2011042733(A1) 申请公布日期 2011.02.24
申请号 US20100857643 申请日期 2010.08.17
申请人 ELPIDA MEMORY, INC. 发明人 KOMEDA KAZUSHI;MIYAJIMA TAKASHI;SUGIOKA SHIGERU;MIYAMURA TAKASHI
分类号 H01L27/108;H01L23/00 主分类号 H01L27/108
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