MULTIPLE OXIDE SINTERED COMPACT, SPUTTERING TARGET, MULTIPLE OXIDE AMORPHOUS FILM AND PRODUCTION METHOD THEREOF, AND MULTIPLE OXIDE CRYSTALLINE FILM AND PRODUCTION METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a multiple oxide crystalline film low in resistivity and excellent in light transmittance.

SOLUTION: The multiple oxide sintered compact is mainly composed of indium, strontium and oxygen, where ratios of the number of atoms of tin and strontium to the total number of atoms of indium, strontium and tin in the multiple oxide sintered compact are 0-0.3 and 0.0001-0.05, respectively, the relative density is 97% or more, and the mean particle size is 7 μm or less.

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