| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device which can be used always in a high resolution condition even when an aberration corrector has a power source noise in the charged particle beam device with corrector. SOLUTION: An image movement amount by a unit fluctuation in each of corrector power sources is measured beforehand, and the noise volume is estimated from power source ripple stability, and that value is taken in the calculation of a beam diameter in the correction condition of a comparison candidate. The condition of use of an aberration corrector from which a higher resolution can be expected is simulated and by comparing with the calculation value of the beam diameter in the case there is no corrector power source noise although there is aberration, the device is automatically adjusted by deciding the best resolution condition. COPYRIGHT: (C)2011,JPO&INPIT
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