| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable wavelength optical filter which accurately controls the distance between reflection films. SOLUTION: The variable wavelength optical filter includes: a first substrate 10 having a first movable part 11 which is movable in thickness direction and a second movable part 12 which is movable in thickness direction; a second substrate 20 which forms an internal space 13 between the second substrate 20 and the first substrate 10 and connected to the first substrate 10; a third substrate 30 which is disposed on the side opposite to the second substrate 20 interposing the first substrate 10; a piezoelectric element 50 pinched between the second movable part 12 and the third substrate 30; a liquid 60 which fills the internal space 13; a first reflection film 15 provided on the face 14 of the first movable part 11; and a second reflection film 22 provided on the second substrate. According to the dislocation in the thickness direction of the piezoelectric element 50, the second movable part 12 is dislocated toward one side in the thickness direction, pressure of the liquid 60 is applied on the first movable part 11 to dislocate the first movable part to the other side in the thickness direction, thus the distance G between the first reflection film 15 and the second reflection film 22 varies. COPYRIGHT: (C)2011,JPO&INPIT
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