| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of performing smooth driving and positioning even under the application of high load. SOLUTION: The stage device includes a lower surface plate 12, an upper surface plate 14, and an intermediate plate 16. The intermediate plate 16, which is formed in a trapezoidal shape, is fastened to the upper surface plate 14 by a screw 18. The intermediate plate 16 and the upper surface plate 14 constitute a movable member on which a dovetail is formed. A dovetail groove, which fits to the dovetail, is formed on the lower surface plate 12 (an immovable member). Rollers 32, 34 are arranged on the side surfaces of the intermediate plate 16, and rollers 36, 38 are arranged on the bottom surface of the intermediate plate 16. COPYRIGHT: (C)2011,JPO&INPIT |
