PIEZOELECTRIC ACTUATOR, METHOD FOR MANUFACTURING THE PIEZOELECTRIC ACTUATOR, LIQUID-EJECTING HEAD, AND LIQUID-EJECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a liquid-ejecting head and a liquid-ejecting apparatus that are stable in amount of ejected liquid by reducing variance in vibration characteristics of each piezoelectric actuator between liquid-ejecting heads or in a liquid-ejecting head.

SOLUTION: A second sputter rate of a second upper electrode 82 is smaller than a first sputter rate of a first upper electrode 81, so when a part of a protective film 100 formed on the second upper electrode 82 is removed by sputtering, the second upper electrode 82 is less sputtered than the upper electrode 80 composed of only the first upper electrode 81, thereby reducing variance in film thickness of the second upper electrode 82. An influence of deformation of a piezoelectric body 70 on hindrance to the upper electrode 80 is reducible to obtain the piezoelectric actuator 310 having small variance in vibration characteristics.

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