| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To accurately and optically detect a distance to a specimen, and inhibit an increase in a cost. <P>SOLUTION: A detector has an optical sensor array 3 having an optical anisotropy, a detection/drive section 6 of the optical sensor array, and a height detection section 7. The detection/drive section 6 drives the optical sensor array 3, images the specimen, and generates a plurality of different detection images P1, P2 based on the light reception anisotropy. The height detection section 7 detects the distance (a height) from a sensor light reception plane of the optical sensor array 3 to the specimen by using a plurality of the detection images. At this time, the height detection section 7 detects the height based on the magnitude of a displacement generated by a light reception anisotropy difference in image portions corresponding to shadows or reflections of the specimen included in a plurality of the detection images. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
