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摘要
申请公布号
JP4636685(B2)
申请公布日期
2011.02.23
申请号
JP20000529005
申请日期
1999.01.21
申请人
发明人
分类号
H01L29/866;H01L21/225;H01L21/329
主分类号
H01L29/866
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地址
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