,申请号JP20000608405-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP4632548(B2)	申请公布日期	2011.02.23
申请号	JP20000608405	申请日期	2000.02.25
申请人		发明人
分类号	H01L21/683;H05H1/46;C23C16/458;H01J37/32;H01L21/205;H01L21/66	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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