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发明名称
Magnetron sputtering source, sputter coating system and method for coating a substrate
摘要
申请公布号
EP1923902(B1)
申请公布日期
2011.02.23
申请号
EP20060124060
申请日期
2006.11.14
申请人
APPLIED MATERIALS, INC.
发明人
KREMPEL-HESSE, JOERG
分类号
H01J37/34;C23C14/35
主分类号
H01J37/34
代理机构
代理人
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地址
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