| 摘要 |
PURPOSE: A structure of a high efficiency solar cell and a method for manufacturing thereof are provided to generate high efficiency energy by using the concentration difference between a doped nitride film and a doped oxide film. CONSTITUTION: A first nitride film(5) has less hydrogen concentration which is formed with a first oxide film, a doped oxide film, and a second oxide film while having a closed-packed configuration. A second nitride film has less hydrogen concentration while has a closed-packed configuration. An emitter region(13) is interposed between an emitter seed electrode and a silicon substrate. The concentration of a base region is higher than that of a silicon substrate. |
