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经营范围
发明名称
substrate transport apparatus
摘要
申请公布号
KR101015937(B1)
申请公布日期
2011.02.23
申请号
KR20080111637
申请日期
2008.11.11
申请人
发明人
分类号
H01L21/687;H01L21/677
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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