发明名称 Fabricating a device with a diamond layer
摘要 In one aspect, a method includes forming a silicon dioxide layer on a surface of a diamond layer disposed on a gallium nitride (GaN)-type layer. The method also includes etching the silicon dioxide layer to form a pattern. The method further includes etching portions of the diamond exposed by the pattern.
申请公布号 US7892881(B2) 申请公布日期 2011.02.22
申请号 US20090390593 申请日期 2009.02.23
申请人 RAYTHEON COMPANY 发明人 CHEN MARY Y.;DEELMAN PETER W.
分类号 H01L21/00 主分类号 H01L21/00
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