发明名称 Columnar structured material and method of manufacturing the same
摘要 A method of manufacturing a dot pattern includes the steps of preparing a structured material composed of a plurality of columnar members containing a first component and a region containing a second component different from the first component surrounding the columnar members, with the structured material being formed by depositing the first component and the second component on a substrate, and removing the columnar members from the structured material to form a porous material having a columnar hole. In addition, a material is introduced into the columnar hole portions of the porous material to form a dot pattern, and the porous material is removed.
申请公布号 US7892979(B2) 申请公布日期 2011.02.22
申请号 US20080119739 申请日期 2008.05.13
申请人 CANON KABUSHIKI KAISHA 发明人 OGAWA MIKI;MIYATA HIROKATSU;OTTO ALBRECHT;KURIYAMA AKIRA;OKURA HIROSHI;DEN TOHRU;FUKUTANI KAZUHIKO
分类号 B82B1/00;H01L21/461;C23C14/16;C23C14/58;H01L21/033;H01L21/302;H01L21/308;H01L21/3205;H01L29/06 主分类号 B82B1/00
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