Surface acoustic wave element and surface acoustic wave device

摘要

A surface acoustic wave element 1 includes an IDT electrode 11 having an electrode finger 11a on a piezoelectric substrate 10. The electrode finger 11a is formed by laminating an intermediate layer 12 and an electrode layer 13 having a higher coefficient of thermal expansion than that of the intermediate layer 12. The electrode finger 11a has a cross section of a trapezoidal shape that widens nearer to the piezoelectric substrate 10. An angle α1 formed with a side surface of the intermediate layer 12 is formed larger than an angle &bgr;1 formed with a side surface of the electrode layer 13.