发明名称 |
Fuse link structures using film stress for programming and methods of manufacture |
摘要 |
A method of forming a programmable fuse structure includes forming at least one shallow trench isolation (STI) in a substrate, forming an e-fuse over the at least one STI and depositing an interlevel dielectric (ILD) layer over the e-fuse. Additionally, the method includes removing at least a portion of the at least one STI under the e-fuse to provide an air gap below a portion of the e-fuse and removing at least a portion of the ILD layer over the e-fuse to provide the air gap above the portion of the e-fuse.
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申请公布号 |
US7892926(B2) |
申请公布日期 |
2011.02.22 |
申请号 |
US20090508962 |
申请日期 |
2009.07.24 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BARTH KARL W.;GAMBINO JEFFREY P.;LEE TOM C.;PETRARCA KEVIN S. |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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