| 摘要 |
A running rail 9 and a second overhead vehicle 12 are arranged parallel to a running rail 7 for a first overhead vehicle 10 and closer to inspection devices 20 than the running rail 7. A buffer 14 is provided below the running rail 7. The overhead vehicle 12 conveys a cassette 40 between load ports 24 and the buffer 14. The overhead vehicle 10 conveys the cassette 40 between the buffer 14 and other positions. The present invention can deal with inspection devices or the like which have a high throughput by locally improving their conveying capability.
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