| 摘要 |
PURPOSE: An electrostatic chuck is provided to prevent damage to the electrostatic chuck controlled according to various temperature by composing a ceramic or carbon fiber with metal. CONSTITUTION: An electrostatic insulating film(11) is formed on the top of an electrostatic chuck body(10). The electrostatic insulating film is formed with a ceramic coating film which is formed on the electrostatic chuck body through a plasma injection coating method. The electrostatic insulating film is made of a composite of metal and ceramic or carbon fiber. A temperature controller such as heater is installed inside the electrostatic chuck body.
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