HIGHLY DENSE PZT-PMNN PIEZOELECTIC THICK FILM AND PREPARATION METHOD THEREOF

摘要

PURPOSE: A high-density PZT-PMnN piezoelectic thick film and a manufacturing method thereof are provided to manufacture a high-density PZT-PMnN piezoelectic thick film without cracks and pores. CONSTITUTION: A piezoelectric element consisting of solid solution of Pb(Zr,Ti)O3 and Pb(Mn1/3Nb2/3)O3 having the perovskite phase is deposited in vacuum on one side of the surface of a substrate through a room temperature/vacuum powder spraying process, thereby forming a piezoelectric thick film. The piezoelectric thick film has thickness more than 5 micron. The piezoelectric thick film has 0.1 Pb(Zr,Ti)O3-Pb(Mn1/3Nb2/3)O3 as a fundamental composition.