发明名称 Thin film transistor
摘要 A thin film transistor is disclosed comprising comprises a substrate, a dielectric layer, and a semiconductor layer. The semiconductor layer, which is crystalline zinc oxide preferentially oriented with the c-axis perpendicular to the plane of the dielectric layer or substrate, is prepared by liquid depositing a zinc oxide nanodisk composition. The thin film transistor has good mobility and on/off ratio.
申请公布号 US7893495(B2) 申请公布日期 2011.02.22
申请号 US20090360164 申请日期 2009.01.27
申请人 XEROX CORPORATION 发明人 LI YUNING;ONG BENG S.
分类号 H01L29/22 主分类号 H01L29/22
代理机构 代理人
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