发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device and a method for manufacturing the same include forming a second copper-plated layer over a second IMD layer and inside a second aperture formed in the second IMD by an electroplating process that uses the exposed first copper-plated layer as a seed layer. With the method, the copper-plated layer may be more simply and rapidly formed and achieve superior gap filling characteristics.
申请公布号 US7892967(B2) 申请公布日期 2011.02.22
申请号 US20090511444 申请日期 2009.07.29
申请人 DONGBU HITEK CO., LTD. 发明人 LEE BYUNG-HO
分类号 H01L21/4763 主分类号 H01L21/4763
代理机构 代理人
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