发明名称 MOS transistor with gate trench adjacent to drain extension field insulation
摘要 An integrated circuit containing an MOS transistor with a trenched gate abutting an isolation dielectric layer over a drift region. The body well and source diffused region overlap the bottom surface of the gate trench. An integrated circuit containing an MOS transistor with a first trenched gate abutting an isolation dielectric layer over a drift region, and a second trenched gate located over a heavily doped buried layer. The buried layer is the same conductivity type as the drift region. A process of forming an integrated circuit containing an MOS transistor, which includes an isolation dielectric layer over a drift region of a drain of the transistor, and a gate formed in a gate trench which abuts the isolation dielectric layer. The gate trench is formed by removing substrate material adjacent to the isolation dielectric layer.
申请公布号 US7893499(B2) 申请公布日期 2011.02.22
申请号 US20090417810 申请日期 2009.04.03
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 DENISON MARIE;PENDHARKAR SAMEER;HU BINGHUA;EFLAND TAYLOR RICE;SEETHARAMAN SRIDHAR
分类号 H01L29/66 主分类号 H01L29/66
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