PURPOSE: A hybrid scrub reactor assembly is provided to efficiently control the heating-up period of the target gas by appropriately controlling the number of first reactor assembly. CONSTITUTION: A first reactor(10) comprises a cover(12) made of a closure(11) and an insulation matter. An inflow port(111) is formed on the side of the closure. An electrode(20) is inserted into the cover of the first reactor. An inflow port(31) and an exhaust port(32) are projected on a second reactor(30). A heater(40) heats the second reactor.
申请公布号
KR20110017126(A)
申请公布日期
2011.02.21
申请号
KR20090074647
申请日期
2009.08.13
申请人
DAWONSYS CO., LTD.;SEJIN ELECTRON INC.
发明人
LIU, HYO YOL;HWANG, SANG KYU;LIM, JIN SUB;KIM, DONG SOO;LEE, SUN KU